| Description | Grade Impurities (Gas Phase) | Electronic 99.995% (N4.5) (Mol. PPM) | VLSI 99.999% (N5.0) (Mol. PPM) | Sigma 3 99.999% (N5.0) (Mol. PPM) |
| Hydrogen Chloride is a pungent, toxic, corrosive gas having a suffocating odour. It is heavier than air and fumes strongly in moist air. | Nitrogen | < 16 | < 2 | < 2 |
| Oxygen + Argonn | < 5 | < 1 | < 1 | |
| THC | < 54 | < 1 | < 1 | |
| Carbon Dioxide | < 10 | < 8 | < 5 | |
| Moisture | < 10 | < 3 | < 2 | |
| CO | - | - | < 1 | |
| Total Metals | - | < 10 ppmw | < 0.5 ppmw | |
| Iron (Fe) | - | - | < 0.1 ppmw | |
| Nickel (Ni) | - | - | < 0.05 ppmw | |
| Chromium (Cr) | - | - | < 0.05 ppmw | |
| Other Metals 1 | - | - | < 0.01 ppmw | |
| 1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn | ||||
| Cylinder Size | Volume (Kg) |
| B44st (A) | 27.3 |
| B50st | 37 |
| Cylinder Data |
| Supplied as a liquefied in seamless steel cylinders. Standard sizes / Volumes as listed - Smaller volumes are available on request. |
| Deluxe GAS can supply any internationally recognised valve type. For Hydrogen Chloride standard internationalvalve types are as follows | |
| American | CGA 330 / DISS 634 |
| European | DIN 477 - 8 |
| Gas Data | |
| Mol. Weight | 80.921 |
| Boiling Point | 66.7°C |
| Density | 3.330 g/cm3 |
| Vapour Pressure | 22.6 bar |
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Plasma etching of polysilicon.
Procured from eminent manufacturers and retailers, our premium quality products comprise of Cylinders and Gases, Cryocans, Cylinder trolleys, Gas regulators, Portable gas canisters, Gas handling equipment, Gas monitoring systems and UHP grade specialty gases.
