| Description |
Grade Impurities (Liquid Phase) |
99.99% (N4.0) (Vol. PPM) |
99.999% (N5.0) (Vol. PPM) |
| Boron Trichloride is a colourless gas, which fumes in the presence of moist air. It has a choking odour. |
Nitrogen |
< 40 |
< 2 |
| Oxygen |
< 20 |
< 1 |
| Carbon Monoxide |
< 20 |
< 0.2 |
| Carbon Dioxide |
- |
< 0.2 |
| Chlorine |
< 5 |
< 0.2 |
| Phosgene |
< 5 |
< 0.5 |
| Hydrogen chloride |
- |
< 1 |
| Mehtane |
- |
< 0.5 |
| Metals Analysis N5.0 Grade only |
Impurity |
Intergas Spec. (PPM wt) |
Impurity |
Intergas Spec. (PPM wt) |
| Ag |
0.1 |
Cu |
0.01 |
| Al |
0.05 |
Fe |
0.1 |
| As |
0.03 |
K |
0.05 |
| Ba |
0.01 |
Li |
0.01 |
| Bi |
0.01 |
Mg |
0.02 |
| Ca |
0.02 |
Mn |
0.01 |
| Cd |
0.01 |
Na |
0.1 |
| Co |
0.01 |
Ni |
0.01 |
| Cr |
0.02 |
Pb |
0.01 |
| Sb |
0.01 |
Si |
0.5 |
| Zn |
0.05 |
- |
- |
| Cylinder Size |
Volume (Kg) |
| B10st |
12 |
| B44st (A) |
50 |
| B50st |
60 |
| Cylinder Data |
Supplied as a liquefied gas in seamless steel cylinders.
Standard sizes / volumes shown for Deluxe Gas cylinders.
Larger volumes are available on request.
|
| Deluxe GAS can supply any internationally recognised valve type. For Boron Trichloride the standard international valve types are as follows |
| American |
CGA 660 / DISS 720 |
| European |
DIN 477 - 8 |
| Gas Data |
| Mol. Weight |
117.17 |
| Boiling Point |
12.4°C |
| Density |
1.37 kg/m3 |
| Vapour Pressure |
1.07 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Common etch gas for thin film applications in Aluminium and Ploysilicon.
