Description |
Grade Impurities (Gas Phase) |
Electronic 99.995% (N4.5) (Mol. PPM) |
VLSI 99.999% (N5.0) (Mol. PPM) |
Sigma 3 99.999% (N5.0) (Mol. PPM) |
Hydrogen Chloride is a pungent, toxic, corrosive gas having a suffocating odour. It is heavier than air and fumes strongly in moist air. |
Nitrogen |
< 16 |
< 2 |
< 2 |
Oxygen + Argonn |
< 5 |
< 1 |
< 1 |
THC |
< 54 |
< 1 |
< 1 |
Carbon Dioxide |
< 10 |
< 8 |
< 5 |
Moisture |
< 10 |
< 3 |
< 2 |
CO |
- |
- |
< 1 |
Total Metals |
- |
< 10 ppmw |
< 0.5 ppmw |
Iron (Fe) |
- |
- |
< 0.1 ppmw |
Nickel (Ni) |
- |
- |
< 0.05 ppmw |
Chromium (Cr) |
- |
- |
< 0.05 ppmw |
Other Metals 1 |
- |
- |
< 0.01 ppmw |
1 Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn |
Cylinder Size |
Volume (Kg) |
B44st (A) |
27.3 |
B50st |
37 |
Cylinder Data |
Supplied as a liquefied in seamless steel cylinders.
Standard sizes / Volumes as listed -
Smaller volumes are available on request.
|
Deluxe GAS can supply any internationally recognised valve type. For Hydrogen Chloride standard internationalvalve types are as follows |
American |
CGA 330 / DISS 634 |
European |
DIN 477 - 8 |
Gas Data |
Mol. Weight |
80.921 |
Boiling Point |
66.7°C |
Density |
3.330 g/cm3 |
Vapour Pressure |
22.6 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Plasma etching of polysilicon.