| Description | Grade Impurities (Lquid Phase) | MEGA 99.998% (N4.8) (Mol. PPM) | Electronic 99.999% (N5.0) (Mol. PPM) |
| Sulphur Hexafluoride is a non-flammable, colourless, odourless gas. | Nitrogen | < 5 | < 1 |
| Oxygen | < 5 | < 0.5 | |
| Halocarbon 14 | < 5 | < 3 | |
| Moisture | < 2 | < 0.3 | |
| Hydrogen Flouride | < 0.1 | < 0.1 |
| Cylinder Size | Volume (Kg) |
| B10st | 10 |
| B44st (A) | 45.8 |
| B50st | 52 |
| Cylinder Data |
| Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders. Standard sizes / Volumes as listed - Larger volumes available on request. |
| Deluxe GAS can supply any internationally recognised valve type. For Sulphur Hexaflouride the standard international valve types are as follows | |
| American | CGA 590 / DISS 716 |
| European | DIN 477 - 6 |
| Gas Data | |
| Mol. Weight | 146 |
| Boiling Point | -63.7°C |
| Density | 0.736 kg/m 3 |
| Vapour Pressure | 21 bar |
Single stage brass or stainless steel body with stainless steel internals.
Deluxe GAS has a variety of suitable handling equipment for this product - please enquire.
Used in the dry etching of films.
Procured from eminent manufacturers and retailers, our premium quality products comprise of Cylinders and Gases, Cryocans, Cylinder trolleys, Gas regulators, Portable gas canisters, Gas handling equipment, Gas monitoring systems and UHP grade specialty gases.
