| Description |
Grade Impurities Gas Phase) |
VLSI 99.9998% (N5.8) (Vol. PPM) |
| Colourless, flammable, highly toxic gas with an odour of decaying fish. |
Argon + Oxygen |
< 1 |
| Arsine |
< 1 |
| Methane |
< 0.5 |
| Carbon Monoxide |
< 0.5 |
| Carbon Dioxide |
< 0.5 |
| Moisture |
< 1 |
| Nitrogen |
< 1 |
| Cylinder Size |
Volume (Kg) |
| B44st (A) |
12.3 |
| B50st |
13.9 |
| Cylinder Data |
Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinder.
Standard sizes / Volumes as listed -
Smaller volumes are available on request.
|
| Deluxe GAS can supply any internationally recognised valve type. For Phosphine the standard international valve types are as follows |
| American |
CGA 350 / DISS 632 |
| European |
DIN 477 - 1 |
| Gas Data |
| Mol. Weight |
33.997 |
| Boiling Point |
-87.7°C |
| Density |
1.40 kg/m 3 |
| Vapour Pressure |
41.9 bar |
Recommended Regulator
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Typical Applications
Used as a dopant in metal / polysilicon dielectrics.
