| Description | Grade Impurities (Lquid Phase) | 99.999% (N5.0) (Vol. PPM) |
| At room temperature silicon Terachloride is a colourless, non flammable, corrosive liquid. | Donors (P, As, Sb) | < 3 ppba |
| Boron | < 0.1 ppba | |
| Aluminium | < 0.003 ppba | |
| Hydrocarbons | < 0.1 ppmw | |
| Carbon | < 0.3 ppma | |
| Trichlorosilane | < 100 ppmw |
| Cylinder Size | Volume (Kg) |
| B10st | up to 12 |
| B50st | up to 60 |
| Cylinder Data |
| Supplied as a liquefied gas in seamless steel cylinders. Standard sizes / Volumes as listed - Larger volumes available on request. |
| Deluxe GAS can supply any internationally recognised valve type. For Tetrachloride the standard international valve types are as follows | |
| American | CGA 330 / DISS 636 |
| European | DIN 477 - 8 |
| Gas Data | |
| Mol. Weight | 169.9 |
| Boiling Point | 57.6°C |
| Density | 1.483 kg/m 3 |
| Vapour Pressure | 0.2 bar |
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Used to plama etch metals and in epitaxial silicon applications.
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