| Description | Grade Impurities (Liquid phase) | Electronic 99.97% (N3.7) (Mol. PPM) | VLSI 99.997% (N4.7) (Mol. PPM) | Sigma 3 99.999% (N5.0) (Mol. PPM) |
| Liquid chlorine is a clear amber-amber-coloured liquied and gaseous chlorine is a greenish yellow. It has a suffocating odour and irritates both the nose and throat. | Nitrogen | < 100 | < 10 | < 2 |
| Oxygen | < 10 | < 2 | < 1 | |
| THC | < 5 | < 0.2 | < 1 | |
| Carbon Dioxide | < 200 | < 7 | < 5 | |
| Moisture | < 5 | < 3 | < 1 | |
| Carbon Monoxide | - | - | < 1 | |
| Iron (Fe) | - | - | < 0.5 ppmw | |
| 1Other metals include : Ca ,Cd, Co, Cu, K, Mg, Mn, Na, Pb, Zn | ||||
| Cylinder Size | Volume (Kg) |
| B44st (A) | 45.5 |
| B50st | 51.7 |
| Cylinder Data |
| Supplied as a liquefied gas under its own vapour pressure in steel or aluminium cylinders. Standard sizes / volumes shown for Proton Gas cylinders. Larger volumes are available on request. |
| Deluxe GAS can supply any internationally recognised valve type. For Chlorine the standard international valve types are as follows | |
| American | CGA 660 / DISS 728 |
| European | DIN 477 - 8 |
| Gas Data | |
| Mol. Weight | 70.906 |
| Boiling Point | -34.05°C |
| Density | 2.980 g/cm3 |
| Vapour Pressure | 5.8 bar |
Deluxe GAS recommends the use of manual or automatic gas cabinets for this product.
Please contact us for further details.
Plasma etching of aluminium and other metal layers.
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